SHROK ABDULLAH. EFFECT OF OXYGEN ON SI ETCH PROFILE USING DC SF6 PLASMA MICROMACHINING. Diyala Journal of Engineering Sciences , [S. l.], p. 57–66, 2010. Disponível em: https://mail.djes.info/index.php/djes/article/view/623. Acesso em: 22 nov. 2024.