The Effect of Spin Coating Speed and deposition parameters on the Crystalline Size of ZnO Thin Films

Aqeel Ali Al-Attar; Safaa Mohammad Hasony; Ali Hussein Ali

doi:10.24237/djes.2013.06407

Authors

Aqeel Ali Al-Attar University of Technology/Production and Metallurgy Engineering Department
Safaa Mohammad Hasony Institute of Technology-Baghdad
Ali Hussein Ali University of Technology/Production and Metallurgy Engineering Department

Keywords:

ZnO, Sol-Gel Spin Coating, Optical Band Gap, Crystal Structure

Abstract

ZnO thin films have been deposited onto the glass-substrates by the sol-gel spin coating method at different chuck rotation rates. This method was used for the preparation of thin films on the important semiconductors ІІ-VІ. The effect of deposition parameters on the structural, optical and electrical properties of the ZnO thin film was investigated. Zinc acetate dehydrate, 2- methoxethanol and monoethanolamine (MEA) were used as a starting material, solvent and stabilizer, respectively. XRD of the dried gel showed that weight loss continued until 300°C, with smallest particle size at 400 rpm spin coating speed.

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